Bistability study of buckled MEMS diaphragms
نویسندگان
چکیده
منابع مشابه
Fabrication of polyimide bi-stable diaphragms using oxide compressive stresses for the field of buckle MEMS
In this paper we develop vacuum-actuated polyimide bi-stable actuators using buckled diaphragms for applications in the field of MEMS. The fabrication process involves a single mask step and DRIE etch step to fabricate the buckled bi-stable diaphragms. Compressive stresses in a companion thermal oxide layer provide pre-stress in the polyimide mechanical films that initiates diaphragm buckling u...
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15 صفحه اولBuckled Membranes for Microstructures
Based on energy variation methods we calculated the deflection of membranes under the combined load of an external pressure and an internal lateral stress. A lateral load gives rise to buckling once a critical load is exceeded. The combination of transversal loads and lateral loads changes the properties of the membrane (and other structures) in the vicinity of the buckling load: The membrane d...
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ژورنال
عنوان ژورنال: Journal of Physics Communications
سال: 2020
ISSN: 2399-6528
DOI: 10.1088/2399-6528/abbe5e